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Yves Caudano publications


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Laboratoire de Spectroscopie Moléculaire de Surface
Yves Caudano


Mechanistic studies of silicon wafer bonding and layer exfoliation

M.K. Weldon (1), V.E. Marsico (1), Y.J. Chabal (1), A. Agarwal, D.J. Eaglesham, J. Sapjeta, W.L. Brown, D.C. Jacobson (1), Y. Caudano (1, 2), S.B. Christman (1) and E.E. Chaban (1)
Proc. Fourth Int. Symp. On Semiconductor Wafer Bonding : Science, Technology and Applications, vol 97-36 (Electrochemical Society, Pennington, NJ, 1998) p. 229


Sorry, this abstract is not yet available.

Author addresses

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  1. Bell Laboratories - Lucent Technologies
    600 Mountain Avenue, Murray Hill, NJ 07974, USA

  2. Laboratoire de Spectroscopie Moléculaire de Surface (LASMOS)
    Institute for Studies in Interface Science (ISIS)
    Facultés Universitaires Notre-Dame de la Paix (FUNDP)
    61 Rue de Bruxelles, B-5000 Namur, Belgium

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Last modified, July 10th 2003

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